A high-precision silicon-on-insulator position sensor
نویسندگان
چکیده
Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint well compatibility with other or electronic circuitry. In this work, we present high-precision optical position sensor fabricated on silicon-on-insulator platform. The relies the principle of position-dependent directional waveguide coupling upon excitation monolithically integrated scatterer tightly focused polarization-tailored beam. We demonstrate spatial resolution 7.2 nm, corresponding to approximately λ/200.
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ژورنال
عنوان ژورنال: APL photonics
سال: 2023
ISSN: ['2378-0967']
DOI: https://doi.org/10.1063/5.0133968